Low-frequency broadband multidirectional vibration isolation by piezoelectric smart platform with active control

A high-precision equipment is very sensitive to vibration, even micro vibration. How isolate the low-frequency broadband multidirectional vibration remains a challenge. As main component of piezoelectric smart isolation model, stack consists actuator, sensor, and rubber layer. The numerical results obtained by finite element method agree well with theoretical solutions. attenuates rapidly under displacement velocity feedback control negative gains. gain decreases, band extended lower frequency. platform model further proposed inclined installation two stacks. spring-like structure designed exert preload pressure on these After optimization gain, can from 0 3000 Hz in multiple directions.